Optimized Laser Thermal Pulsing of Atom Probe Tomography: LEAP 4000X™

Preparation of nanowire specimens for laser-assisted atom probe tomography.

The availability of reliable and well-engineered commercial instruments and data analysis software has led to development in recent years of robust and ergonomic atom-probe tomographs. Indeed, atom-probe tomography (APT) is now being applied to a broader range of materials classes that involve highly important scientific and technological problems in materials science and engineering. Dual-beam...

Ultrafast Laser Assisted Field Evaporation and Atom Probe Tomography Applications

Considering the recent developments of the pulsed laser in the femtosecond domain, the possibility of conceiving a new laser assisted Tomographic Atom Probe has been nvisaged. The instrument is able to map out the 3D distributions of the atomic positions in a The interest of the terial sciences has already been demonstrated many times [3,4]. However, since HV mples have to be electrically good ...

Atom probe tomography in nanoelectronics

The role of laser assisted atom probe tomography (APT) in microelectronics is discussed on the basis of various illustrations related to SiGe epitaxial layers, bipolar transistors or MOS nano-devices including gate all around (GAA) devices that were carried out at the Groupe de Physique des Matériaux of Rouen (France). 3D maps as provided by APT reveal the atomic-scale distribution of dopants a...

First data from a commercial local electrode atom probe (LEAP).

The first dedicated local electrode atom probes (LEAP [a trademark of Imago Scientific Instruments Corporation]) have been built and tested as commercial prototypes. Several key performance parameters have been markedly improved relative to conventional three-dimensional atom probe (3DAP) designs. The Imago LEAP can operate at a sustained data collection rate of 1 million atoms/minute. This is ...

Toward atom probe tomography of microelectronic devices